Synthesis And Characterization Of Ge Nanocrystals Embedded In High-k Dielectric (HfO2) Matrix

V. Saikiran1*, N. Manikanthababu1, N. Srinivasa Rao2, S. V. S. Nageswara Rao1, A. P. Pathak1

1School of Physics, University of Hyderabad, Hyderabad 500046, India

2Department of Physics, Malaviya National Institute of Technology, Jaipur 302017, India

Adv. Mater. Lett., 2016, 7 (12), pp 957-963

DOI: 10.5185/amlett.2016.6403

Publication Date (Web): Oct 12, 2016

E-mail:saivadavalli@gmail.com, sai_vadavalli@yahoo.com

Abstract


Trilayered HfO2/Ge/HfO2 thin films were grown on Si substrate by RF magnetron sputtering with HfO2 and Ge targets. The subsequent rapid thermal annealing (RTA) of these films at 700 & 800°C results in formation of Ge nanocrystals (NCs) in HfO2 matrix. X-ray diffraction (XRD) and micro-Raman spectroscopy measurements were performed to confirm the formation of Ge NCs in the annealed samples. XRD results indicate that the as-deposited samples show amorphous behaviour, whereas the annealed samples clearly confirm the crystallinity of the films. The average size of the Ge NCs was found to increase with an increase in annealing temperature. Raman scattering studies confirm that the annealed samples exhibit a shift in peak position corresponding to Ge-Ge optical phonon vibrations, which clearly indicates the formation of Ge NCs. Conversely, as-deposited samples were also irradiated with swift heavy ions of 150 MeV Au and 80 MeV Ni at a fluence of 3×1013 ions/cm2 to synthesize Ge NCs. The structural properties of pristine and irradiated samples have been studied by using X-ray diffraction, Raman spectroscopy to substantiate the growth of Ge NCs upon irradiation. The results obtained by RTA are compared with the irradiated ones.

Keywords

Ge nanocrystals, high-k dielectric HfO2, XRD, micro-raman, ion irradiation.

Current Issue

Advanced Materials Congress Celebrating 10th Years of Establishment


Secure Management of Networked Batteries for Building Integrated Photovoltaics (BIPV) Systems  


The Cause of 100-year Low Carbonated Concrete of the Bridge 


Organic Montmorillonite Intercalated Nano-composites Prevent Post-Surgical Associated Infections


Morphology/tensile Performance Relationship for LLDPE/PP Double Gated Injected Blends


Preparation and Characterization of Nickel Ferrite Nanoparticles via Sol-gel Method


Nitrogen-doped Diamond Nanowire Gas Sensor for the Detection of Methane


Manufacture of Functional Open-cell Al Foams with Recycled Al Scraps using NaCl Ball Space Holder 


Vilsmeier-Haack Transformations under Non Classical Conditions


New Application of Highly Vesicular Basalt from Jabel Isbil Volcano (Dhamar-Rada'a Volcanic Field), Yemen


An Assessment of Tribological Characteristics under different Operating Condition


Functional Bi Coatings as A Perspective Material for Radiation Shields Production against Electron Radiation


Effects of Silica Modified NiFe2O4 on the Dielectric and Electrical Properties of NiFe2O4 filled Poly (methyl methacrylate) Composites


Previous issues
The Journey of a Decade to Advancing Materials Are the Electrospun Polymers Polymeric Fibers? Mechanical and Thermal Properties of Composite Material and Insulation for a Single Walled Tank for Cryogenic Liquids Prediction of Long-Term Behavior for Dynamically Loaded TPU Investigation of Doped Titanium Dioxide in Anatase Phase. Study ab initio using Density Functional Theory Comparison between Single Al2O3 or HfO2 Single Dielectric Layers and their Nanolaminated Systems Preparation of Stable and Optimized Antibody-gold Nanoparticle Conjugates for Point of Care Test Immunoassays Resonance-Based Temperature Sensors using a Wafer Level Vacuum Packaged SOI MEMS Process Integrated System Based on the Hall Sensors Incorporating Compensation of the Distortions The Efficacy of Cinnamomum Tamala as a Potential Antimicrobial Substance against the Multi-Drug Resistant Enterococcus Faecalis from Clinical Isolates The Effect of Complexing Reagent on Structural, Electrical and Optical Properties of CuS Thin Film Laser Cladding of Fluorapatite Nanopowders on Ti6Al4V Preparation and Evaluation of Sulfonate Polyethylene Glycol Borate Ester as a Modifier of Functional Properties of Complex Petroleum Lithium Grease

Upcoming Congress

Knowledge Experience at Sea TM