Synthesis And Thermal Analysis Of Yttrium Metallorganic Complexes For Evaluation As Chemical Vapor Deposition Precursors

J. Selvakumar1*, K. S. Nagaraja2

1Powder Metallurgy Division, Bhabha Atomic Research Centre, Vashi Complex, Navi Mumbai 400 705, India

2Department of Chemistry, Loyola Institute of Frontier Energy, Loyola College, Chennai 600 034, India

Adv. Mater. Lett., 2012, 3 (2), pp 130-135

DOI: 10.5185/amlett.2011.7293

Publication Date (Web): Apr 14, 2012

E-mail: j.maselva@gmail.com

Abstract


The thermal stability and suitability of synthesized yttrium metallorganic complexes were studied for chemical vapor deposition use by thermogravimetric analyses. The phase purity of the synthesized complexes was analyzed by powder X-ray diffraction and mass spectral techniques. The equilibrium vapor pressure of screened yttrium complexes was measured over a temperature range 319–475 K using the horizontal thermogravimetric analyzer as a transpiration apparatus. Model and model-free solid-state kinetic methods were applied to non-isothermal and isothermal measurements to derive kinetic characteristics of the sublimation/evaporation process of selected yttrium vapor sources in the conversion range of 0.1 < 0.7. The relevant results are discussed in detail.

Keywords

Yttrium ?-diketonates,thermogravimetric analysis, enthalpy of evaporation, CVD precursors

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