An Аpproach for Nanostructuring of Piezoelectric Materials by Template-assisted Growth in Porous Aluminum Oxide

Tsvetozar Tsanev1,*, Mariya Aleksandrova1, Boriana Tzaneva2, Valentin Videkov1

1Department of Microelectronics, Technical University of Sofia, 8, Kliment Ohridski Blvd., 1000 Sofia, Bulgaria

2Department of Chemistry, Technical University of Sofia, 8 St. Kliment Ohridksi Blvd, 1756 Sofia, Bulgaria

Adv. Mater. Lett., 2020, 11 (10), 20101566

DOI: 10.5185/amlett.2020.101566

Publication Date (Web): Aug 21, 2020



This paper is devoted to the approach for nanostructuring piezoelectric materials to enhance their electrical signal producing ability from a small area of mechanical activation for potential application as energy harvesting. The geometrical structuring of the piezoelectric material leads to higher piezoelectric voltage per unit volume in comparison with a non-structured thin film. Template properties of porous anodic aluminium oxide (AAO) allow this approach. AAO layers with a variety of pore diameters (from 80nm to 100nm) were produced without overheating degradation of the substrates. The thickness of the studied layer was 19 1µm. It was realized sputtering of potassium niobate deposition into AAO to a maximum penetration of piezoelectric material into the pores. The obtained final structure was observed by scanning electron microscopy and Energy Dispersive X-Ray spectroscopy. The registered piezoelectric effect reaches to 454 mV for the reanodized membrane with pores widening. In this work, we continue to explore and further development of our previous research for template-assisted growth in porous aluminium oxide.


Piezoelectric nanostructures, Nanogenerators, Energy harvesting, Template-assisted growth, Porous aluminium oxide.

Upcoming Congress

Knowledge Experience at Sea TM