1Beijing National Laboratory for Condensed Matter Physics, Institution of Physics Chinese Academy of Sciences, Beijing 100190, China
2Collaborative Innovation Center of Quantum Matter, Beijing, 100190, China
3School of Physical Sciences, CAS Key Laboratory of Vacuum Physics, University of Chinese Academy of Sciences, Beijing 100190, China
Adv. Mater. Lett., 2018, 9 (10), pp 727-732
DOI: 10.5185/amlett.2018.2146
Publication Date (Web): Jul 18, 2018
Copyright © IAAM-VBRI Press
E-mail: czgu@iphy.ac.cn
The uniformity in temperature-field of the hot filament chemical vapor deposition (HFCVD) system is of great importance since it is a critical parameter that determines the quality of the deposited films. In fact, the temperature-field is mainly filament distribution dependent. In conventional analysis method, the filament array usually has an equal-space distribution, which leads to a remarkable edge effect and consequently unable to obtain large area uniformity in temperature-field in HFCVD for high-quality thin film deposition. Here, we proposed theoretically an asymmetrical filament distribution to reduce the edge-effect of temperature field. The adjacent filament distance was optimized by using numerical simulation based on heat-transfer theory. Based the optimized condition, temperature difference as low as 13 K between the center and edge region of the filament arrays can be achieved in 100-mm substrate, which is only one tenth of the temperature difference of that in the case that the filaments were evenly distributed. Thus unequal-space distribution can be employed to enhance the uniformity in temperature field of the HFVCD system in favor of the growth of high quality thin films in large area.
Perspectives on Published Energy Sources and Smart Energy Supplies
State of Art Review on Nanobubbles
Eggshell Membrane Assisted CdS Nanoparticles for Manganese Removal in Water Treatment
Green Chemistry Synthesis of Nano-Hydroxyapatite using Natural Stabilisers
Structural, Optical and Electrical Properties of CaSnO3 and Ca0.98Nd0.02Sn0.98Ti0.02O3 Synthesized using Sol-Gel Method
Phase Change Materials Reinforced with Aluminium Foam for Latent Heat Storage
Influence of Manganese and Copper Doping on Structural and Optical Properties of Chromium Oxide Nanoparticles
Understanding of intriguing metal to semiconductor transition in Ni0.5Zn0.5Fe2O4 nanoparticulates
Flaw Resistance and Mode - I Fracture Energy Redistribution in Bamboo - A Correlation
COVID-19: A Significant Revival Approach - Concurrent Case Study in India
Recent Advances in Biochar Modification for Energy Storage in Supercapacitors: A Review
Viral Evolution of Multiple Coronavirus Genomes on Genomic Index Maps
Solution Combustion Synthesis and Energy Transfer in LaMgAl11O19:Tb3+/Sm3+ Tunable Phosphor
Influence of Fe3O4 and CTABr on the Rate of Degradation of Methylene Blue by H2O2
Effect of Sulfurization Temperature on RF Sputtered MoS2 Thin Film
Fatigue Analysis for Fe-34.5Mn-l0Al-0.76C Tidal Turbine Blades using Rainflow Algorithm
Modelling for the Study of Thermoelastic Properties of Nanoparticles
Potato Starch Edible Films as Environmentally Friendly Carriers for Model Drug: In vitro Release Study