1Solid State Physics Laboratory, DRDO, Lucknow Road, Timarpur, Delhi 110054, India
2Department of Physics, IIT Delhi, Hauz Khas, New Delhi 110016, India
Adv. Mater. Lett., 2018, 9 (3), pp 169-174
DOI: 10.5185/amlett.2018.6973
Publication Date (Web): May 16, 2018
Copyright © IAAM-VBRI Press
E-mail: shankardutta77@gmail.com
This paper discussed about the integration issues of Pb (Zr0.52Ti0.48) O3 – BiFeO3 (PZT - BFO) multilayer thin film deposited on silicon substrate for possible application in future micro-electro-mechanical system (MEMS) devices. The PZT - BFO multilayer thin film is deposited on silicon wafer by sol-gel technique. The multilayer film is annealed at 650 °C in air for 60 min. The deposited multilayer film is found to be polycrystalline in nature. The PZT-BFO multilayer exhibited room temperature multiferroic properties (remnant polarization of 37 mC/ cm2 and remnant magnetization of 3.1 emu / cm3). To fabricate the PZT - BFO multiferroic cantilever structures, a two-mask process flow is developed. Etch rates of the PZT - BFO multilayer (180 nm/ min), ZrO2 buffer layer (35 nm/ min) and SiO2 layer (350 nm/ min) are optimized in CHF3 plasma. The multiferroic cantilever structures are released by isotropic etching of silicon using SF6 plasma. Bending and cracks are observed in the released cantilever structures due to the generation of residual stress in the multilayer thin film. Effect of residual stress on the PZT - BFO cantilever structure is also verified by simulation.
Water and Sanitation Management: During and after COVID-19 Pandemic
Polymeric Energy Materials: Development and Challenges
Influence of Different Copolymer Based Compatibilizers on Performance of Pristine and Recycled PP/PE blends
Bio Ceramics: New Material from Mangrove Bark
Hybrid Physical Chemical Vapour Deposition (HPCVD) of Superconducting MgB2 Thin Films on three Dimensional Copper Substrates
Photoinduced Electron Transfer Reactions of tris(4,4’-dimethoxy-2,2’-bipyridyl)ruthenium(II)cation with Quinones in Aqueous Medium
A Comparative Study of Green Synthesized AgNPs using Carissa Carandas and Nerium indicum Leaves and its Activities against Selected Human Pathogens and MCF 7 Cell
Design and Modelling of Carbon Fiber Grid Structure based Carbon/Epoxy Composites for Enhanced Microwave Absorbing Properties
Elaboration and Characterization of Macroporous Bioceramics using Polymeric Sponge Replication Method
Advanced Healthcare Biomaterials
Piezoelectric Alternative Energy Sources as a Part of the Global Energy Concerns – Future Prospects in the Science and Market
Rectify the Injury-Induced Microenvironment Imbalance in Peripheral Nerve Repair
A Mini Review on Biodegradable Magnesium Alloy Vascular Stent
Prospective Applications of Marine Oriented Materials in the Repair of Peripheral Nerve Injury
Design and Implementation of Dynamic FPAA Based Interface Circuit for Thin Film Lead-Free Piezoelectric Sensors
An Аpproach for Nanostructuring of Piezoelectric Materials by Template-assisted Growth in Porous Aluminum Oxide
Study of Sputtered Barium Strontium Titanate Films for Energy Harvesting Applications
The Effect of Bias on Properties of DLC Coatings for Artificial Joints
Fabrication of Tens-micron-sized Functionalized Polystyrene Microspheres for Utilization in Chiral Drug Isolation
Copyright ©2010-2020 VBRI Press
Full Article