1Solid State Physics Laboratory, DRDO, Lucknow Road, Timarpur, Delhi 110054, India
2Department of Physics, IIT Delhi, Hauz Khas, New Delhi 110016, India
Adv. Mater. Lett., 2018, 9 (3), pp 169-174
DOI: 10.5185/amlett.2018.6973
Publication Date (Web): May 16, 2018
Copyright © IAAM-VBRI Press
E-mail: shankardutta77@gmail.com
This paper discussed about the integration issues of Pb (Zr0.52Ti0.48) O3 – BiFeO3 (PZT - BFO) multilayer thin film deposited on silicon substrate for possible application in future micro-electro-mechanical system (MEMS) devices. The PZT - BFO multilayer thin film is deposited on silicon wafer by sol-gel technique. The multilayer film is annealed at 650 °C in air for 60 min. The deposited multilayer film is found to be polycrystalline in nature. The PZT-BFO multilayer exhibited room temperature multiferroic properties (remnant polarization of 37 mC/ cm2 and remnant magnetization of 3.1 emu / cm3). To fabricate the PZT - BFO multiferroic cantilever structures, a two-mask process flow is developed. Etch rates of the PZT - BFO multilayer (180 nm/ min), ZrO2 buffer layer (35 nm/ min) and SiO2 layer (350 nm/ min) are optimized in CHF3 plasma. The multiferroic cantilever structures are released by isotropic etching of silicon using SF6 plasma. Bending and cracks are observed in the released cantilever structures due to the generation of residual stress in the multilayer thin film. Effect of residual stress on the PZT - BFO cantilever structure is also verified by simulation.
Current Scenario of Coronavirus Pandemic
Study on a New Type of Walking Training System with Human Compatibility
Vitalized Water
Piezoelectric d15 Shear-Mode Sensor in Parallel and Series Configurations
A Lowering Friction Treatment for Railway Materials
Biomachines for Medical Diagnosis
Do the Ni binding modes on C12N12 cluster influence its H2 trapping capability?
Investigation of Mechanical, Thermal and Melt Flow Performance of Polycarbonate Hybrid Composites Containing Mica Flakes and Glass Fiber
Effect of Incident Light on Transport Properties of Pulsed Laser Deposited Manganite Thin Films
Celebrating 10th Years of Diamond Open Access Publishing in Advanced Materials
Cerebral Oxygenation Studies Through Near Infrared Spectroscopy: A Review
Analysis of Fine Sulfoaluminate Cement by Strength and Thermogravimetric Analysis
Characterization of the Interfacial Surface Energy for Composite Electrical Conduction Measurements using Two Full Range Percolation Threshold Models
Quantitative Detect of Fatigue of Membrane of Erythrocyte in Uniform Shear Field
Ecofriendly-developed Polyacrylic Acid-coated Magnetic Nanoparticles as Catalysts in Photo-fenton Processes
Evaluation of Drug Interactions with Medications Prescribed to Ambulatory Patients with Metabolic Syndrome in Urban Area
Fiber-reinforced Cementitious Composite: Sensitivity Analysis and Parameter Identification
Evaluation of Drug Utilization Patterns Based on World Health Organization Drug use Indicators at Outpatients Clinics
Are Quantitatively Micro-machined Scaffolds Effective for Cell Technology?
Synthesis and Characterization of Gold Nanoparticles from Lobelia Nicotianifolia Leaf Extract and its Biological Activities
Advanced Oxidations of Tartrazine Azo-dye
Antifungal Activity of Salvia jordanii Against the Oral Thrush Caused by the Cosmopolitan Yeast Candida albicans among Elderly Diabetic Type 2 patients
Copyright ©2010-2020 VBRI Press
Full Article