Nano-textured Pb (Zr0.52Ti0.48)O3/ZnO Hetero-structure On Silicon Substrate   

¹Solid State Physics Laboratory, DRDO, Lucknow Road, Timarpur, Delhi 110054, India

²Department of Physics, Indian Institute of Technology, Hauz Khas, New Delhi 110016, India

Adv. Mater. Lett., 2016, 7 (12), pp 951-956

DOI: 10.5185/amlett.2016.6509

Publication Date (Web): Oct 12, 2016

Copyright © IAAM-VBRI Press

E-mail:singhksushil@gmail.com; sk.singh@sspl.drdo.in

Abstract

Metal oxide based hetero-structures (like Pb (Zr_xTi_1-x) O₃ – ZnO) can be used for wide variety of future sensors and electronic devices. This paper presents growth and electrical properties of nano-textured (110) Pb (Zr_0.52Ti_0.48) O₃/ (001) ZnO hetrostructure on oxidized silicon substrate by RF sputtering technique. The grain sizes of ZnO and PZT films are found to be around 30 nm and 80 nm respectively. Resistivity of the ZnO layer is found to be 1x10⁹ ?-cm. The electrical properties of the film are studied by creating in-plane electrodes on top of the PZT/ZnO hetrostructure film. The remnant polarization of the film is found ~ 47 µC/ cm² at 200 kV/ cm². Dielectric constant of the film is found to be 300 at 1 kHz. The film also showed a low leakage current density of ~ 10^-5 A/cm² at 200 kV/ cm applied electric field. The nano-textured (110) Pb (Zr_0.52Ti_0.48) O₃/ (100) ZnO hetrostructure integrated with inter-digital-transducers and microelectronic is well suitable for low-cost, robust, programmable passive micro sensors for military structure and systems such as aircraft, missiles.

Keywords

PZT, ZnO, hetero-structure, ferroelectric.