Variation In Mechanical Properties With Substrate Temperature Of SbTi Thin Film Deposited By RF Sputtering Technique

A. Rambabu, Anil Tumuluri, K.C. James Raju

1School of Physics, University of Hyderabad, Hyderabad 500046, India

2Advanced Centre of Research in High Energy Materials, University of Hyderabad, India

Adv. Mater. Lett., 2014, 5 (5), pp 292-296

DOI: 10.5185/amlett.2013.fdm.12

Publication Date (Web): Mar 09, 2014

E-mail: kcjrsp@uohyd.ernet.in

Abstract


Nanoindentation technique has been used to determine the mechanical properties of bismuth layered structure ferroelectric thin films, which have been shown to be promising for MEMS based devices used in sensing, actuation and energy harvesting, especially at elevated temperatures. SBTi (SrBi4Ti4O15) is a promising layered ferroelectric material and thin films of this composition are deposited on amorphous fused silica substrates by rf sputtering technique varying the substrate temperature from 600–725oC. The crystal structure and surface morphology of SBTi thin films are characterized by X-ray diffraction and atomic force microscopy. Depth- sensing nanoindentation system is used to measure the mechanical characteristics of SBTi thin films. Nanoindentation measurements reveal that the Young’s modulus and hardness of SBTi thin films are related with grain size and crystal orientation which in turn depend on substrate temperature. The increase in mechanical properties with grain size is observed, indicating the reverse Hall-Petch effect. Furthermore, hardness and Young’s modulus of the (119) oriented films were higher than those of (0010) oriented films. The tribological properties of these films are confirmed by performing the scratch tests on the same films.

Keywords

RF sputtering, crystal orientation, mechanical properties, tribological properties.

Current Issue

Advanced Materials Congress Celebrating 10th Years of Establishment


Secure Management of Networked Batteries for Building Integrated Photovoltaics (BIPV) Systems  


The Cause of 100-year Low Carbonated Concrete of the Bridge 


Organic Montmorillonite Intercalated Nano-composites Prevent Post-Surgical Associated Infections


Morphology/tensile Performance Relationship for LLDPE/PP Double Gated Injected Blends


Preparation and Characterization of Nickel Ferrite Nanoparticles via Sol-gel Method


Nitrogen-doped Diamond Nanowire Gas Sensor for the Detection of Methane


Manufacture of Functional Open-cell Al Foams with Recycled Al Scraps using NaCl Ball Space Holder 


Vilsmeier-Haack Transformations under Non Classical Conditions


New Application of Highly Vesicular Basalt from Jabel Isbil Volcano (Dhamar-Rada'a Volcanic Field), Yemen


An Assessment of Tribological Characteristics under different Operating Condition


Functional Bi Coatings as A Perspective Material for Radiation Shields Production against Electron Radiation


Effects of Silica Modified NiFe2O4 on the Dielectric and Electrical Properties of NiFe2O4 filled Poly (methyl methacrylate) Composites


Previous issues
The Journey of a Decade to Advancing Materials Are the Electrospun Polymers Polymeric Fibers? Mechanical and Thermal Properties of Composite Material and Insulation for a Single Walled Tank for Cryogenic Liquids Prediction of Long-Term Behavior for Dynamically Loaded TPU Investigation of Doped Titanium Dioxide in Anatase Phase. Study ab initio using Density Functional Theory Comparison between Single Al2O3 or HfO2 Single Dielectric Layers and their Nanolaminated Systems Preparation of Stable and Optimized Antibody-gold Nanoparticle Conjugates for Point of Care Test Immunoassays Resonance-Based Temperature Sensors using a Wafer Level Vacuum Packaged SOI MEMS Process Integrated System Based on the Hall Sensors Incorporating Compensation of the Distortions The Efficacy of Cinnamomum Tamala as a Potential Antimicrobial Substance against the Multi-Drug Resistant Enterococcus Faecalis from Clinical Isolates The Effect of Complexing Reagent on Structural, Electrical and Optical Properties of CuS Thin Film Laser Cladding of Fluorapatite Nanopowders on Ti6Al4V Preparation and Evaluation of Sulfonate Polyethylene Glycol Borate Ester as a Modifier of Functional Properties of Complex Petroleum Lithium Grease

Upcoming Congress

Knowledge Experience at Sea TM