Effect of process parameters on the properties of ultrananocrystalline diamond films deposited using
1Department of Applied Physics, Birla Institute of Technology, Mesra, Ranchi 835215, India
2School of Chemistry, University of Bristol, Bristol BS8 1TS, United Kingdom
Adv. Mater. Lett., 2014, 5 (4), pp 172-179
DOI: 10.5185/amlett.2013.10550
Publication Date (Web): Feb 16, 2014
Copyright © IAAM-VBRI Press
E-mail: vijay7chatterjee@gmail.com
Ultrananocrystalline diamond (UNCD) films are deposited using microwave plasma enhanced chemical vapor deposition system. Depositions of films are carried out at low pressure 25 mbar, low temperature 400 ºC and at low microwave power (800 - 1000 Watt). Diamond thin films were characterized using Raman spectroscopy, AFM, field emission scanning electron microscopy and optical contact angle measurements. In-situ diagnosis of the plasma composition is carried out using optical emission spectroscopy (OES). OES spectra show intense peak at 516.5nm corresponding to C2 dimer. Peaks at 387.0nm, 405.3nm, 431.5nm, 486.1nm, and 656.1nm have also been observed. Effect of horizontal position of plasma ball with respect to substrate position has been critically analyzed. Relation between the horizontal positioning and plasma ball along with the emission spectra of different gas species are studied which are very much crucial to predict the uniformity and morphology of the films deposited. Dependence of film wetability with the plasma ball positioning and relative intensity of carbon dimer has been studied C2 dimer plays an important role not only in the nucleation and growth of UNCD films but also on the surface modification .
Ultrananocrystalline diamond, optical emission spectroscopy, C2 dimer, plasma ball.
Advanced Materials Research and Innovation Priorities for Accomplishing the Sustainable Development Goals
Contemporary Advances in Humidity Sensing Materials, Methods, and Performances
Roles of the Debye Length and Skin Depth in the Characterization of Space Charge Interactions in Semiconductor Nanoparticles
Antifungal Activity of Iron-gold and Cobalt-gold co-doped ZnO Nanoparticles
Adsorption and Thermodynamic Parameters of Activated Carbon-Diazepam Systems in Simulated Gastric Fluid
Synthesis, Impedance and Current-Voltage Spectroscopic Characterization of Novel Gadolinium Titanate Nano Structures
Removal of Toxic Dyes from Industrial Waste Water using Chitosan Grafted Itaconic Acid Nanocomposites
Structural, Optical and dielectric properties of Sr doped LaVO4
Design, 3D Development and Finite Element Analysis of Cylindrical Mesh Cage Bioimplants from Biometals
Advancements in Materials Technology for Accomplishing Sustainable Development Goals
A Review for Luminescence Property of Materials, Its Detection and Probabilities for Embedding of Luminescence with MEMS Technology
A Review on Low-Cost Adsorbents for Cadmium Pollutant Removal from Industrial Effluents
Study of Applications of Radial Basis Function Network in Forecasting
Simulation of LPG Pressure Vessel under Fire Engulfment
Strength Analysis of Friction Stir Welding (FSW) Joint Under Minimize Rotation Speed of FSW Tool
Formation of Pure In2O3 pallets for OLED Application
Study of Soil Nitrogen Level and Splitting on Nutrient Uptake around the Industries of Chhattisgarh, India