Cover Page March-2018-Advanced Materials Letters

Advanced Materials Letters

Volume 9, Issue 3, Pages 169-174, March 2018
About Cover


Effect of residual stress in Pb (Zr0.52Ti0.48) O3 – BiFeO3 multilayer cantilever structure

Shankar Dutta1*, Ramjay Pal1 and Ratnamala Chatterjee

1Solid State Physics Laboratory, DRDO, Lucknow Road, Timarpur, Delhi 110054, India

2Department of Physics, IIT Delhi, Hauz Khas, New Delhi 110016, India

Adv. Mater. Lett., 2018, 9 (3), pp 169-174

DOI: 10.5185/amlett.2018.6973

Publication Date (Web): May 16, 2018

E-mail: shankardutta77@gmail.com

Abstract

This paper discussed about the integration issues of Pb (Zr0.52Ti0.48) O3 – BiFeO3 (PZT - BFO) multilayer thin film deposited on silicon substrate for possible application in future micro-electro-mechanical system (MEMS) devices. The PZT - BFO multilayer thin film is deposited on silicon wafer by sol-gel technique. The multilayer film is annealed at 650 °C in air for 60 min. The deposited multilayer film is found to be polycrystalline in nature. The PZT-BFO multilayer exhibited room temperature multiferroic properties (remnant polarization of 37 mC/ cm2 and remnant magnetization of 3.1 emu / cm3). To fabricate the PZT - BFO multiferroic cantilever structures, a two-mask process flow is developed. Etch rates of the PZT - BFO multilayer (180 nm/ min), ZrO2 buffer layer (35 nm/ min) and SiO2 layer (350 nm/ min) are optimized in CHF3 plasma. The multiferroic cantilever structures are released by isotropic etching of silicon using SF6 plasma. Bending and cracks are observed in the released cantilever structures due to the generation of residual stress in the multilayer thin film. Effect of residual stress on the PZT - BFO cantilever structure is also verified by simulation. 

Keywords

Pb (Zr0.52Ti0.48) O3, BiFeO3, etching, cantilever, residual stress.

Previous issues

Current Global Scenario of Electric Vehicles

Review on Detection of Phenol in Water 

Investigating the Machinability of Metallic Matrix Composites Reinforced by Carbon Nanotubes: A Review

Photocatalytic ZnO based PES Membranes for AOP Water Treatments under UV and Sunlight

Plasma Activated Water as a Source of Nitrogen for Algae Growth

Digital Light Processing (DLP) 3D Printing of Polyethylene Glycol (PEG) Biopolymer, Commercially available Ultra-High and Tough (UHT) Resin and Maghemite (γ-Fe2O3) Nanoparticles Mixture for Tissue Engineering Scaffold Application

Fabrication of Nanoparticle Embedded Polymeric Microbeads as an Efficient Drug Delivery System

Micro/Nanostructured Papers from Bagasse Pulp Reinforced by Nanofibrillated Cellulose from different Agro-Waste Sources

Structural, Optical and Magnetic Properties of Pristine, (Mn, Al) co-doped ZnO Nanocrystallites Synthesized via co-Precipitation Method

Nanosecond Laser Surface Patterning of Ti6Al4V Bio-alloy for Improved Biological Performance

Synthesis of Cu2O/Ag Composite Nanocubes with Promising Photoluminescence and Photodegradation Activity over Methylene Blue Dye

Locally available Clays of Bangladesh as a Replacement of imported Clays for Ceramic Industries 

Green Synthesis and Characterization of Silver Nanoparticles using Cassia auriculata Leaves Extract and Its Efficacy as A Potential Antibacterial and Cytotoxic Effect

Upcoming Congress

Knowledge Experience at Sea TM