Deflection behavior of focused-ion-beam deposited carbon nanocantilever and overhung structures

Prashant K Sarswat1, 2*, Madhusudan Jagannathan2

1Department of Physics, Indian Institute of Technology Kanpur, Kanpur 208016, India

2Department of Metallurgical Engineering, University of Utah, Salt Lake City, UTAH 84112, United States

Adv. Mater. Lett., 2017, 8 (4), pp 324-330

DOI: 10.5185/amlett.2017.6889

Publication Date (Web): Mar 14, 2017

E-mail: saraswatp@gmail.com

Abstract


Elastic properties of nanostructures are crucial for the adequate design and long term use of nano/micro-electro-mechanical system (NEMS/MEMS) as well as their utility in nanoindentation. Carbon nanostructures were fabricated by focused ion beam (FIB) assisted deposition and milling using Naphthalene (C10H8) as a precursor gas. Cantilevers of size 3-10 µm were fabricated and their elastic properties were monitored. An end point load was applied by successive deposition of Pt or carbon in a form of vertical column. Euler–Bernoulli beam theory was applied to examine the mechanical properties of the cantilever. It has been observed that expected deflection of the carbon nano-cantilever is significantly different compared to most of the reported micro or nano-sized carbon or diamond structures. Initial investigation of such a discrepancy suggests that Ga implantation and presence of core-shell type structure are the main causes of altered mechanical properties. 

Keywords

Focused ion beam, CVD, MEMS, NEMS, cantilever.

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